SFB 668


SFB 668

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3.12.2013, 17:00
Jungiusstr. 11, Hörsaal AP

SFB 668 - Kolloquium

Prof. A. Berger (University of San Sebastian):

Fabrication of individual nano-magnets and nano-magnet arrays by Focused Electron Beam Induced Deposition (FEBID)

During the past decade, FEBID has been established as a one-step technique for the fabrication of 1-, 2- and even 3-dimensional nanostructures. Specifically, there has been a growing interest in the development of FEBID processes for magnetic materials in the last few years, namely for Fe, Co and Ni [1], which may provide new routes for the fabrication of magnetic nano-devices as well as complex nano-magnet designs. Among these ferromagnetic metals, Co attracts the most attention because an exceptional high purity can be obtained under the correct deposition conditions. Here, we present a systematic investigation of the deposition parameters and the characterization of the structure and physical properties of our FEBID cobalt deposits, including the effect of unintended parasitic deposits as well as strategies for their removal [2]. The magnetic properties of our deposits were characterized by MOKE microscopy. Specifically, we investigated individual nano-scale wires down to diameter sizes of 30 nm [3] as well as magnetic dot-arrays with periods as low as 13 nm.
References [1] R. Lavrijsen et al., Nanotechnology 22, 025302 (2011); Y.M. Lau et al., J. Vac. Sci. Technol A 20, 1295 (2002); A. Fernandez-Pacheco et al., J. Phys.D: Appl. Phys. 42, 055005 (2009); A. Perentes et al., J. Vac. Sci. Technol. B 25, 2228 (2007) [2] E. Nikulina, O. Idigoras, J. M. Porro, P. Vavassori, A. Chuvilin and A. Berger, Appl. Phys. Lett. 103, 123112 (2013) [3] E. Nikulina, O. Idigoras, P. Vavassori, A. Chuvilin and A. Berger, Appl. Phys. Lett. 100, 142401 (2012)

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